| 000 | 00596pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2011 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780470625958 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.38152 _bR275h |
||
| 100 | _aReinhardt, Karen A. | ||
| 245 | 0 |
_aHandbook of cleaning for semiconductor manufacturing _bfundamentals and applications _cKaren A. Reinhardt and Richard F. Reidy |
|
| 260 |
_aNew Jersey _bJohn Wiley & Sons _c2011 |
||
| 300 | _axxii, 590p | ||
| 630 | 0 |
_aSemiconductors _aOptoelectronics |
|
| 700 | _aReidy, Richard F. | ||
| 997 | _aA171313 C | ||
| 999 |
_c369025 _d369025 |
||