000 00529pam a2200169a 44500
008 160408b2010 xxu||||| |||| 00| 0 eng d
020 _a9783642041563
040 _aIIT, Kanpur
082 _a621.395
_bD414t
100 _aDeng, Yangdong
245 1 _a3-Dimensional VLSI
_ba 2.5-dimensional integration scheme
_cYangdong Deng and Wojciech P. Maly
260 _aBerlin
_bSpringer-Verlag
_c2010
300 _axii, 190p
650 _aCircuitry
700 _aMaly, Wojciech P.
997 _aA171258 s C
999 _c368877
_d368877