| 000 | 00468pam a2200181a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 008 | 160408b1995 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780070585027 | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bSm51t |
||
| 100 | _aSmith, Donald L. | ||
| 245 | 0 |
_aThin-film deposition _bprinciples and practice _cDonald L, Smith |
|
| 260 |
_aNew York _bMcgraw-Hill _c1995 |
||
| 300 | _axxiii, 616p. | ||
| 650 | _aThin films | ||
| 942 | _cBK | ||
| 999 |
_c367164 _d367164 |
||