| 000 | 00616pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2010 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780815515944 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.38152 _bH191 |
||
| 100 | _a | ||
| 245 | 1 |
_aHandbook of silicon based MEMS materials and technologies _cedited by Veikko Lindroos ...[et al.] |
|
| 260 |
_aAmsterdam _bElsevier _c2010 |
||
| 300 | _axxxii, 636p | ||
| 440 |
_aMicro & Nano Technologies / Edited By Jeremy Ramsden _v |
||
| 650 | _aMicroelectronical systems -- Materials | ||
| 700 | _aLindroos, Veikko | ||
| 997 | _aA168960 C | ||
| 999 |
_c367142 _d367142 |
||