| 000 | 00561pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2008 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9789812568236 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.38152 _bY8s |
||
| 100 | _aYoo, Chue San | ||
| 245 | 0 |
_aSemiconductor manufacturing technology _cChue San Yoo |
|
| 260 |
_aNew Jersey _bWorld Scientific _c2008 |
||
| 300 | _axii, 470p | ||
| 440 |
_aAdvanced Series In Electrical And Computer Engineering / Edited By W.K. Chen _vV.13 |
||
| 650 | _aSemiconductor | ||
| 997 | _aA168550 C | ||
| 999 |
_c366641 _d366641 |
||