| 000 | 00479pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b2010 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780080964546 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a620.50287 _bL468f |
||
| 100 | _aLeach, Richard K. | ||
| 245 | 0 |
_aFundamental principles of engineering nanometrology _cRichard K. Leach |
|
| 260 |
_aAmsterdam _bElsevier _c2010 |
||
| 300 | _axxvi, 321p | ||
| 650 | _aNanotechnology | ||
| 997 | _aA167888 s C | ||
| 999 |
_c366126 _d366126 |
||