000 00623pam a2200181a 44500
008 160408b2009 xxu||||| |||| 00| 0 eng d
020 _a9781596932463
040 _aIIT, Kanpur
082 _a621.381
_bIn8
100 _a
245 1 _aIntegrated interconnect technologies for 3D nanoelectronic systems
_cedited by Muhannad S. Bakir and James D. Meindl
260 _aBoston
_bArtech House
_c2009
300 _axx, 528p
440 _aIntegrated Microsystems Series
_v
650 _aInterconnects (Integrated Circuit Technology)
700 _aBakir, Muhannan S., Ed.
997 _aA166217 s C
999 _c364617
_d364617