| 000 | 00654pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2009 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781420059113 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a621.38152 _bP153n |
||
| 100 | _aPaik, Ungyu | ||
| 245 |
_aNanoparticle engineering for chemical-mechanical planarization _bfabrication of next-generation nanodevices _cUngyu Paik and Jea-Gun Park |
||
| 260 |
_aBoca Raton _bCrc Press _c2009 |
||
| 300 | _axiii, 191p | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | _aChemical mechanical planarization. | ||
| 700 | _aPark, Jea-Gun | ||
| 997 | _aA165392 s C | ||
| 999 |
_c364098 _d364098 |
||