| 000 | 00501pam a2200193a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 008 | 160408b1988 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0127806210 | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a539.6 _bIo6z2 |
||
| 245 |
_aIon Implantation science and technology [2nd ed.] _cedited by J.F. Ziegler |
||
| 250 | _a2nd ed | ||
| 260 |
_aBoston _bAcademic Press _c1988 |
||
| 300 | _aix, 498p | ||
| 650 | _aIon implantation | ||
| 700 | _aZiegler, J. F. [ed.] | ||
| 942 | _cBK | ||
| 999 |
_c363598 _d363598 |
||