000 00510pam a2200169a 44500
008 160408b2007 xxu||||| |||| 00| 0 eng d
020 _a9780521831994
040 _aIIT, Kanpur
082 _a621.38152
_bF683
100 _a
245 _aFocused ion beam systems
_bbasics and applications
_cedited by Nan Yao
260 _aCambridge
_bCambridge University Press
_c2007
300 _axi, 395p.
650 _aFocused ion beams
700 _aYao, Nan , Ed.
997 _aA164130 C
999 _c363546
_d363546