000			00521pam a2200169a 44500
008			160408b2009 xxu||||| |||| 00| 0 eng d
020			_a9783527316984
082			_a621.381 _bL626
100			_a
245			_aLIGA and its applications _cedited by Volker Saile...[et al.]
260			_aWeinheim _bWiley-Vch Verlag _c2009
300			_ax,479p
440			_aAdvanced Micro And Nanosystems / Edited By O. Brand _vV.7
650			_aMicroelectromechanical systems
700			_aSaile, Volker, Ed.
997			_aA164530 s C
999			_c363416 _d363416