000			00665pam a2200193a 44500
008			160408b2008 xxu||||| |||| 00| 0 eng d
020			_a9780387765327
082			_a621.38152 _bW121
100			_a
245			_aWafer level 3-D ICs process technology _cedited by Chuan Seng Tan, Ronald J. Gutmann and L.Rafael Reif
260			_aNew York _bSpringer _c2008
300			_axiv, 358p
440			_aSeries On Integrated Circuits And Systems / Anantha Chandrakasan _v
500			_aForwarded By Scott List
504			_aIncludes bibliographical references and index
650			_aOptoelectronic devices
700			_aTan, Chuan Seng, Ed.
997			_aA165034 s C
999			_c362933 _d362933