000			00623pam a2200181a 44500
008			160408b2009 xxu||||| |||| 00| 0 eng d
020			_a9780387095356
082			_a681.753 _bAc16m
100			_aAcar, Cenk
245			_aMEMS vibratory gyroscopes _bstructural approaches to improve robustness _cCenk Acar and Andrei Shkel
260			_aNew York _bSpringer Science+Business Media _c2009
300			_axii, 256p
440			_aMems Reference Shelf/ Edited By Stephen D. Senturia _v
504			_aIncludes bibliographical references and index
650			_aGyroscopes.
700			_aShkel, Andrei
997			_aA164983 C
999			_c362568 _d362568