000			00577pam a2200181a 44500
008			160408b2009 xxu||||| |||| 00| 0 eng d
020			_a9783540745587
040			_aIIT, Kanpur
082			_a621.38152 _bIn88
100			_a
245			_aInto the nano era _bMoore's law beyond planar silicon CMOS _cedited by Howard R. Huff
260			_aBerlin _bSpringer _c2009
300			_axxviii, 343p
440			_aSpringer Series Inn Materials Science _vNo.106
650			_aIntegrated circuits
700			_aHuff, Howard R., Ed.
997			_aA164350 C
999			_c362240 _d362240