000			00577pam a2200169a 44500
008			160408b2008 xxu||||| |||| 00| 0 eng d
020			_a9781860948626
082			_a621.3815 _bAd95
100			_a
245			_aAdvances in multiphysics simulation and experimental testing of MEMS _cedited by Attilio Frangi ... [et al.]
260			_aLondon _bImperial College Press _c2008
300			_axii,489p
440			_aComputational And Experimental Methods In Structures _vV.2
650			_aMicroelectromechanical systems
700			_aFrangi, Attilio, Ed.
997			_aA162730 C
999			_c361964 _d361964