| 000 | 00536pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9783527312467 | ||
| 082 |
_a670.42 _bM583 |
||
| 100 | _a | ||
| 245 |
_aMicro process engineering _bfundamentals, devices, fabrication, and applications _cedited by Norbert Kockman |
||
| 260 |
_aWeinheim _bWiley-Vch _c2006 |
||
| 300 | _axxii, 507p. | ||
| 440 |
_aAdvanced Micro And Nanosystems _vV.5 |
||
| 650 | _aProduct Engineering | ||
| 700 | _aKockman, Norbert,Ed. | ||
| 997 | _aA162364 v.5 C | ||
| 999 |
_c361714 _d361714 |
||