| 000 | 00458pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b2008 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780470083017 | ||
| 082 |
_a621.381 _bH859m2 |
||
| 100 | _aHsu, Tai-Ran | ||
| 245 | 1 |
_aMEMS and microsystems _bdesign, manufacture and nanoscale engineering _cTai-Ran Hsu |
|
| 250 | _a2nd ed. | ||
| 260 |
_aNew Jersey _bJohn Wiley _c2008 |
||
| 300 | _axxv, 550p. | ||
| 650 | _aMicroelectronics | ||
| 997 | _aA161984 C | ||
| 999 |
_c361124 _d361124 |
||