000			00565pam a2200169a 44500
008			160408b2008 xxu||||| |||| 00| 0 eng d
020			_a9780849380693
082			_a620.5 _bJ559m
100			_aJha, A. R.
245	1		_aMEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications _cby A. R. Jha
260			_aBoca Raton _bCrc Press _c2008
300			_axxix, 401p.
650			_aMicroelectromechanical Systems
650			_aDetectors
650			_aTelecommunication -- Equipment And Supplies
997			_aA161460 C
999			_c361083 _d361083