000 00430pam a2200145a 44500
008 160408b2008 xxu||||| |||| 00| 0 eng d
020 _a978981275426
082 _a620.5
_bN157ts
100 _aNanofabrication
245 _aNanofabrication
_bfundamentals and applications
_cEdited by Ampere A. Tseng
260 _aNew Jersey
_bWorld Scientific
_c2008
300 _aviii, 574p.
650 _aNanostructures
997 _aA161723 C
999 _c360274
_d360274