000 00513pam a2200169a 44500
008 160408b2008 xxu||||| |||| 00| 0 eng d
020 _a9781846289774
082 _a620.5
_bAu82
100 _a
245 1 _aAutomated nanohandling by microrobots
_cedited by Sergej Fatikow
260 _aLondon
_bSpringer-Verlag
_c2008
300 _axvi, 346p
440 _aSpringer Series In Advanced Manufacturing
_v
650 _aMicroelectromechanical systems
700 _aFatikow, Sergej , Ed.
997 _aA159965 s C
999 _c359221
_d359221