000 00721pam a2200193a 44500
008 160408b2005 xxu||||| |||| 00| 0 eng d
020 _a352740502X
082 _a620.50287
_bN157
100 _aWilkening,Gunter
245 1 _aNANOSCALE CALIBRATION STANDARDS AND METHODS
_cDIMENSIONAL AND RELATED MEASUREMENTS IN THE MICRO- AND NANOMETER RANGE
260 _a
_bWiley-Vch Verlag Gmbh & Co. Kgaa, Weinheim
_c2005
300 _axxii,519
650 _aNanostructured Materials -- Measurement -- Congresses
650 _aMicrostructure -- Measurement -- Congresses
650 _aScientific Apparatus And Instruments -- Calibration -- Congresses
700 _aKoenders,Ludger
964 _gCIRC
997 _aA156983 s C
999 _c358133
_d358133