000 00416pam a2200169a 44500
008 160408b2004 xxu||||| |||| 00| 0 eng d
020 _a3540202528
082 _a620.5
_bM583
100 _aKnobloch,Harald
245 1 _aMICRONANO INTEGRATION
260 _a
_bSpringer-Verlag, Berlin
_c2004
300 _a302
650 _aNanotechnology
700 _aKaminorz,Yvette
964 _gCIRC
997 _aA148696 C
999 _c358064
_d358064