000 | 00416pam a2200169a 44500 | ||
---|---|---|---|
008 | 160408b2004 xxu||||| |||| 00| 0 eng d | ||
020 | _a3540202528 | ||
082 |
_a620.5 _bM583 |
||
100 | _aKnobloch,Harald | ||
245 | 1 | _aMICRONANO INTEGRATION | |
260 |
_a _bSpringer-Verlag, Berlin _c2004 |
||
300 | _a302 | ||
650 | _aNanotechnology | ||
700 | _aKaminorz,Yvette | ||
964 | _gCIRC | ||
997 | _aA148696 C | ||
999 |
_c358064 _d358064 |