000 00541pam a2200169a 44500
008 160408b2005 xxu||||| |||| 00| 0 eng d
020 _a0071445595
082 _a621.38152
_bG287S
100 _aGeng,Hwaiyu
245 1 _aSEMICONDUCTOR MANUFACTURING HANDBOOK
260 _a
_bMcgraw-Hill, New York
_c2005
300 _axxi,
650 _aSemiconductor -- Design And Construction -- Handbooks, Manuals, Etc
650 _aIntegrated Ciruits -- Design And Construction -- Handbooks, Manuals, Etc
964 _gCIRC
997 _aA157205 C
999 _c357967
_d357967