| 000 | 00449pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2007 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0387258744 | ||
| 082 |
_a620.5 _bJ132M |
||
| 100 | _aJackson,Mark J. | ||
| 245 | 1 | _aMICRO AND NANOMANUFACTURING | |
| 260 |
_a _bSpringer Science+Business Media Inc., New York _c2007 |
||
| 300 | _ax,699 | ||
| 650 | _aMicrofabrication | ||
| 650 | _aNanotechnology | ||
| 964 | _gCIRC | ||
| 997 | _aA159151 C | ||
| 999 |
_c357517 _d357517 |
||