| 000 | 00572pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b2007 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9783527406333 | ||
| 082 |
_a620.5 _bOS7P |
||
| 100 | _aOstrikov,Kostya (Ken) | ||
| 245 | 1 |
_aPLASMA-AIDED NANOFABRICATION _cFROM PLASMA SOURCES TO NANOASSEMBLY |
|
| 260 |
_a _bWiley-Vch Verlag Gmbh & Co. Kgaa, Weinheim _c2007 |
||
| 300 | _axiii,300 | ||
| 650 | _aNanostructured Materials | ||
| 650 | _aPlasma Engineering | ||
| 650 | _aLow Temperature Plasma | ||
| 700 | _aXu,Shuyan | ||
| 964 | _gCIRC | ||
| 997 | _aA159628 s C | ||
| 999 |
_c357491 _d357491 |
||