| 000 | 00651pam a2200229a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230913144608.0 | ||
| 008 | 160408b1993 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0071127445 | ||
| 040 | _cIITK | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bM584p |
||
| 100 | _aMiddleman, Stanley | ||
| 245 | 1 |
_aProcess engineering analysis in semiconductor device fabrication _cMiddleman, Stanley |
|
| 260 |
_bMcgraw-Hill _c1993 _a New York |
||
| 300 | _axvii,774 | ||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | _aSemiconductors | ||
| 650 | _aDesign and construction | ||
| 700 | _aHochberg, Arthur K. | ||
| 942 | _cBK | ||
| 999 |
_c356865 _d356865 |
||