| 000 | 00521pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2007 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780470013601 | ||
| 082 |
_a621.381 _bD564 |
||
| 100 | _aBaklanov,Mikhail,Green,Martin | ||
| 245 | 1 | _aDIELECTRIC FILMS FOR ADVANCED MICROELECTRONICS | |
| 260 |
_a _bJohn Wiley And Sons Ltd., Chichester _c2007 |
||
| 300 | _axxii,486 | ||
| 650 | _aDielectric Flims | ||
| 650 | _aMicroelectronics -- Materials | ||
| 700 | _aMaex,Karen | ||
| 964 | _gCIRC | ||
| 997 | _aA158672 C | ||
| 999 |
_c356273 _d356273 |
||