000 00504pam a2200181a 44500
008 160408b2006 xxu||||| |||| 00| 0 eng d
020 _a352731055X
082 _a621.366
_bT413
100 _aMisawa,Hiroaki
245 1 _a3 D LASER MICROFABRICATION
_cPRINCIPLES AND APPLICATIONS
260 _a
_bWiley-Vch, Weinheim
_c2006
300 _axv,388
650 _aLasers -- Industrial Applications
650 _aMicrofabrication
700 _aJuodkazis,Saulius
964 _gCIRC
997 _aA157352 C
999 _c356139
_d356139