000			00549pam a2200193a 44500
008			160408b2003 xxu||||| |||| 00| 0 eng d
020			_a0306474972
082			_a621.044 _bC421L
100			_aChen,Francis F.,Chang,Jane P.
245	1		_aLECTURE NOTES ON PRINCIPLES OF PLASMA PROCESSING
260			_a _bKluwer Academic / Plenum Publishers,New York _c2003
300			_aix,208
500			_aWith Cd-Rom
650			_aPlasma Engineering
650			_aPlasma Chemistry
650			_aPlasma Dynamics
964			_gCIRC
997			_aA158049 C
999			_c355844 _d355844