| 000 | 00702pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0387245200 | ||
| 082 |
_a620.5 _bM583L |
||
| 100 | _aLeondes,Cornelius T. | ||
| 245 | 1 |
_aMEMS/NEMS _cHANDBOOK TECHNIQUES AND APPLICATIONS |
|
| 260 |
_a _bSpringer Science+Business Media Inc., New York _c2006 |
||
| 300 | _axviii,380 | ||
| 500 | _aContents : V. 1. Design Methods -- V. 2. Fabrication Techniques -- V. 3. Manufacturing Methods -- V. 4. Sensors And Actuators -- V. 5. Medical Applications And Moems | ||
| 650 | _aMicroelectromechanical Systems -- Design And Construction | ||
| 650 | _aNanotechnology | ||
| 964 | _gCIRC | ||
| 997 | _aA157266 s C | ||
| 999 |
_c355563 _d355563 |
||