000 00702pam a2200181a 44500
008 160408b2006 xxu||||| |||| 00| 0 eng d
020 _a0387245200
082 _a620.5
_bM583L
100 _aLeondes,Cornelius T.
245 1 _aMEMS/NEMS
_cHANDBOOK TECHNIQUES AND APPLICATIONS
260 _a
_bSpringer Science+Business Media Inc., New York
_c2006
300 _axviii,380
500 _aContents : V. 1. Design Methods -- V. 2. Fabrication Techniques -- V. 3. Manufacturing Methods -- V. 4. Sensors And Actuators -- V. 5. Medical Applications And Moems
650 _aMicroelectromechanical Systems -- Design And Construction
650 _aNanotechnology
964 _gCIRC
997 _aA157265 s C
999 _c355562
_d355562