| 000 | 00472pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3540211179 | ||
| 082 |
_a621 _bM583 |
||
| 100 | _aKorvink,Jan G. | ||
| 245 | 1 |
_aMEMS _bA PRACTICAL GUIDE TO DESIGN, ANALYSIS AND APPLICATIONS |
|
| 260 |
_a _bWilliam Andrew, Norwich, Ny _c2006 |
||
| 300 | _axxv,965 | ||
| 650 | _aMicroelectromechanical Systems | ||
| 700 | _aPaul,Oliver | ||
| 964 | _gCIRC | ||
| 997 | _aA155871 C | ||
| 999 |
_c355468 _d355468 |
||