000			00597pam a2200193a 44500
008			160408b2006 xxu||||| |||| 00| 0 eng d
020			_a0819459771
082			_a610.28 _bSA34
100			_aSaliterman,Steven S.
245	1		_aFUNDAMENTALS OF BIOMEMS AND MEDICAL MICRODEVICES
260			_a _bSpie-The International Soc. For Optical Engg., Washington _c2006
300			_axxvii,610
500			_aIncludes Bibliographical References And Index.
650			_aNanotechnology
650			_aBiotechnology
650			_aMicroelectromechanical Systems
964			_gCIRC
997			_aA155180 C
999			_c355244 _d355244