| 000 | 00452pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2002 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0125249756 | ||
| 082 |
_a621.38152 _bOH6M2 |
||
| 100 | _aOhring,Milton | ||
| 245 | 1 | _aMATERIALS SCIENCE OF THIN FILMS | |
| 250 | _a2nd | ||
| 260 |
_a _bAcademic Press,San Diego _c2002 |
||
| 300 | _axxi,794 | ||
| 650 | _aVacuum Science -- Thin Film Technology | ||
| 964 |
_cText _gTEXT |
||
| 997 | _aA140306 C | ||
| 999 |
_c354951 _d354951 |
||