| 000 | 00402pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a013199204X | ||
| 082 |
_a621.3 _bL74F |
||
| 100 | _aLiu,Chang | ||
| 245 | 1 | _aFOUNDATIONS OF MEMS | |
| 260 |
_a _bPearson Education,New Jersey _c2006 |
||
| 300 | _axxii,530 | ||
| 650 | _aMicroelectromechanical Systems | ||
| 964 | _gCIRC | ||
| 997 | _aA154008 C | ||
| 999 |
_c354454 _d354454 |
||