000 00563pam a2200205a 44500
008 160408b2005 xxu||||| |||| 00| 0 eng d
020 _a1402032382
082 _a537.5
_bSA59P
100 _aSantos,Hector J. De Los
245 1 _aPRINCIPLES AND APPLICATIONS OF NANOMEMS PHYSICS
260 _a
_bSpringer, Aa Dordrecht
_c2005
300 _axv,254
440 _aMicrosystems
_v
650 _aQuantum Electronics
650 _aWave-Particles Duality
650 _aNanotechnology
700 _aSenturia,Stephen D.
964 _gCIRC
997 _aA157639 C
999 _c354452
_d354452