000 | 00563pam a2200205a 44500 | ||
---|---|---|---|
008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
020 | _a1402032382 | ||
082 |
_a537.5 _bSA59P |
||
100 | _aSantos,Hector J. De Los | ||
245 | 1 | _aPRINCIPLES AND APPLICATIONS OF NANOMEMS PHYSICS | |
260 |
_a _bSpringer, Aa Dordrecht _c2005 |
||
300 | _axv,254 | ||
440 |
_aMicrosystems _v |
||
650 | _aQuantum Electronics | ||
650 | _aWave-Particles Duality | ||
650 | _aNanotechnology | ||
700 | _aSenturia,Stephen D. | ||
964 | _gCIRC | ||
997 | _aA157639 C | ||
999 |
_c354452 _d354452 |