| 000 | 00639pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a352740502X | ||
| 082 |
_a620.50287 _bN15 |
||
| 100 | _aWilkening,Gunter | ||
| 245 | 1 |
_aNANOSCALE CALIBRATION STANDARDS AND METHODS _cDIMENSIONAL AND RELATED MEASUREMENTS IN THE MICRO- AND NANOMETER RANGE |
|
| 260 |
_a _bWiley-Vch, Weinheim _c2005 |
||
| 300 | _axxii,519 | ||
| 650 | _aNanostructured Materials -- Measurement | ||
| 650 | _aMicrostructure -- Measurement | ||
| 650 | _aScientific Apparatus And Instruments | ||
| 700 | _aKoenders,Ludger | ||
| 964 | _gCIRC | ||
| 997 | _aA151818 C | ||
| 999 |
_c353605 _d353605 |
||