| 000 | 00547pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0387231161 | ||
| 082 |
_a621.38152 _bIN8F |
||
| 100 | _aGiannuzzi,Lucille A. | ||
| 245 | 1 |
_aINTRODUCTION TO FOCUSED ION BEAMS _cINSTRUMENTATION, THEORY, TECHNIQUES AND PRACTICE |
|
| 260 |
_a _bSpringer Science+Business Media Inc., New York _c2005 |
||
| 300 | _axiv,357 | ||
| 650 | _aFocused Ion Beams | ||
| 650 | _aSemiconductors | ||
| 700 | _aStevie,Fred A. | ||
| 964 | _gCIRC | ||
| 997 | _aA153509 C | ||
| 999 |
_c353436 _d353436 |
||