000 | 00454pam a2200169a 44500 | ||
---|---|---|---|
008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
020 | _a0 444 51616 6 | ||
082 |
_a621.381 _bB22A |
||
100 | _aBao,Minhang | ||
245 | 1 | _aANALYSIS AND DESIGN PRINCIPLES OF MEMS DEVICES | |
260 |
_a _bElsevier,Amsterdam _c2005 |
||
300 | _axii,312 | ||
650 | _aMems | ||
650 | _aMicroelectromechanical Systems Devices | ||
964 | _gCIRC | ||
997 | _aA153012 C | ||
999 |
_c353378 _d353378 |