| 000 | 00454pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0 444 51616 6 | ||
| 082 |
_a621.381 _bB22A |
||
| 100 | _aBao,Minhang | ||
| 245 | 1 | _aANALYSIS AND DESIGN PRINCIPLES OF MEMS DEVICES | |
| 260 |
_a _bElsevier,Amsterdam _c2005 |
||
| 300 | _axii,312 | ||
| 650 | _aMems | ||
| 650 | _aMicroelectromechanical Systems Devices | ||
| 964 | _gCIRC | ||
| 997 | _aA152431 C | ||
| 999 |
_c353283 _d353283 |
||