| 000 | 00482pam a2200181a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 008 | 160408b2005 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0387233105 | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a621.381 _bEL25S |
||
| 100 | _aSetter,Nava | ||
| 245 | 1 |
_aElectroceramic-Based Mems _bfabrication-technology and applications |
|
| 260 |
_bSpringer-Verlag, New York _c2005 |
||
| 300 | _axii,414 | ||
| 650 | _aMicroelectromechanical Systems | ||
| 942 | _cBK | ||
| 999 |
_c352948 _d352948 |
||