000			00544pam a2200181a 44500
008			160408b2005 xxu||||| |||| 00| 0 eng d
020			_a0819450219
082			_a621.381 _bM583O
100			_aMotamedi,Manouchehr E.
245	1		_aMOEMS _cMICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS
260			_a _bSpie-The International Soc. For Optical Engg., Washington _c2005
300			_axxi,614
650			_aMicroelectromechanical Systems
650			_aOptoelectronic Devices
650			_aMicrofabrication
964			_gCIRC
997			_aA151629 s C
999			_c352690 _d352690