000 00508pam a2200169a 44500
008 160408b2005 xxu||||| |||| 00| 0 eng d
020 _a0878494928
082 _a546.683
_bSA58F
100 _aSangster,Raymond C.
245 1 _aFORMATION OF SILICON NITRIDE
_bFROM THE 19TH. TO THE 21ST. CENTURY
260 _a
_bTrans Tech Pub., Zuerich
_c2005
300 _ax,948
440 _aMaterials Science Foundations
_v22-24
650 _aSilicon Nitride -- Bibliography
964 _gCIRC
997 _aA153704 C
999 _c352663
_d352663