| 000 | 00572pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2006 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0849335434 | ||
| 082 |
_a621.38152 _bSC27O |
||
| 100 | _aOhmi,Tadahiro | ||
| 245 | 1 | _aSCIENTIFIC WET PROCESS TECHNOLOGY FOR INNOVATIVE LSI/FPD MANUFACTURING | |
| 260 |
_a _bCrc Press, Boca Raton _c2006 |
||
| 300 | _axiii,386 | ||
| 650 | _aSemiconductors -- Design And Construction | ||
| 650 | _aSemiconductors -- Cleaning | ||
| 650 | _aIntegrated Circuits -- Design And Construction | ||
| 964 | _gCIRC | ||
| 997 | _aA155221 C | ||
| 999 |
_c352279 _d352279 |
||