| 000 | 00476pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b2001 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0824705068 | ||
| 082 |
_a621.38152 _bH191D |
||
| 100 | _aDiebold,Alain C | ||
| 245 | 1 | _aHANDBOOK OF SILICON SEMICONDUCTOR METROLOGY | |
| 260 |
_a _bMarcel Dekker, New York _c2001 |
||
| 300 | _axvi,874 | ||
| 650 | _aSemiconductors -- Measurement | ||
| 650 | _aSemiconductors -- Inspection | ||
| 964 | _gCIRC | ||
| 997 | _aA146033 s C | ||
| 999 |
_c351921 _d351921 |
||