000			00767pam a2200217a 44500
008			160408b2004 xxu||||| |||| 00| 0 eng d
020			_a0819452521
082			_a621.381 _bM519
100			_aJanson,Siegfried W
245	1		_aMEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS
260			_a _bSpie-The International Soc. For Optical Engg., Washington _c2004
300			_axxxi,232
440			_aProceedings Of Spie--The International Society For Optical Engineering _v
500			_aSponsored By Spie-The International Society For Optical Engineering
500			_aIncludes Index
650			_aMicroelectromechanical Systems--Congresses
650			_aOptoelectronic Devices--Congresses
700			_aHenning,Albert K
964			_gCIRC
997			_aA150778 C
999			_c350971 _d350971