| 000 | 00478pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a352730746X | ||
| 082 |
_a620.5 _bEN11 |
||
| 100 | _aH. Baltes,No | ||
| 245 | 1 | _aENABLING TECHNOLOGY FOR MEMS AND NANODEVICES | |
| 260 |
_a _bWiley-Vch, Weinheim _c2004 |
||
| 300 | _axii,427 | ||
| 440 |
_aAdvanced Micro & Nanosystems _v |
||
| 650 | _aNanotechnology | ||
| 700 | _aBaltes,H. | ||
| 964 | _gCIRC | ||
| 997 | _aA149419 s C | ||
| 999 |
_c350542 _d350542 |
||