| 000 | 00586pam a2200217a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230817101109.0 | ||
| 008 | 160408b2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0470851066 | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a621.3 _bF857I |
||
| 100 | _aFranssila, Sami | ||
| 245 | 1 |
_aIntroduction to microfabrication _cSami Franssila |
|
| 260 |
_bJohn Wiley & Sons _c2004 _aChichester |
||
| 300 | _axvii, 401p | ||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aElectronic apparatus and appliances | ||
| 650 | _aMicrofabrication | ||
| 942 | _cBK | ||
| 999 |
_c350362 _d350362 |
||