| 000 | 00509pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b2003 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0125112211 | ||
| 082 |
_a620.195 _bIN8 |
||
| 100 | _aS P Murarka,M Eizenberg,A K Sinha | ||
| 245 | 1 | _aINTERLAYER DIELECTRICS FOR SEMICONDUCTOR TECHNOLOGIES | |
| 260 |
_a _bElsevier, Amsterdam _c2003 |
||
| 300 | _axiv,444 | ||
| 650 | _aDielectrics | ||
| 650 | _aElectric Insulators And Insulation | ||
| 700 | _aSinha,A K | ||
| 964 | _gCIRC | ||
| 997 | _aA148914 C | ||
| 999 |
_c350113 _d350113 |
||