| 000 | 00671pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408b2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1402019688 | ||
| 082 |
_a621.381 _bM583H |
||
| 100 | _aVasyl Michael Harik,Li-Shi Luo | ||
| 245 | 1 |
_aMICROMECHANICS AND NANOSCALE EFFECTS _cMEMS, MULTI-SCALE MATERIALS AND MICRO-FLOWS |
|
| 260 |
_a _bKluwer Academic Publishers, 3300 Ah Dordrecht _c2004 |
||
| 300 | _axv,240 | ||
| 440 |
_aIcase/Larc Interdisciplinary Series In Science And Engineering _v |
||
| 650 | _aMicroelectromechanical Systems | ||
| 650 | _aActuators | ||
| 650 | _aMicroelectronics | ||
| 700 | _aLuo,Li-Shi | ||
| 964 | _gCIRC | ||
| 997 | _aA149477 s C | ||
| 999 |
_c350016 _d350016 |
||